DocumentCode
3453444
Title
Press velocity dependence in nanoimprint lithography
Author
Yoshikawa, T. ; Takagi, Naofumi ; Kanakugi, T. ; Schulz, H. ; Scheer, H.-C. ; Hirai, Y.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
128
Lastpage
129
Keywords
Frequency measurement; Mechanical factors; Mechanical variables measurement; Microstructure; Nanolithography; Polymers; Strain measurement; Thermal engineering; Vibration measurement; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245757
Filename
1459507
Link To Document