• DocumentCode
    3455626
  • Title

    Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS growth mechanism

  • Author

    Yang, Ming-Che ; Shich, J. ; Ko, Tsung-Shine ; Chen, Hsuen-Li ; Chu, Tieh-Chi

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    276
  • Lastpage
    277
  • Keywords
    Dry etching; Fabrication; Germanium; Gold; Hydrogen; Nanoparticles; Nanostructures; Nanowires; Plasma applications; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245649
  • Filename
    1459583
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3455626