DocumentCode
3456282
Title
Carbon nanotube cvd-growth technology for future ULSI interconnects
Author
Awano, Yuji
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
318
Lastpage
319
Keywords
Carbon nanotubes; Copper; Current density; Laboratories; Materials science and technology; Ohmic contacts; Temperature; Thermal conductivity; Thermal stresses; Ultra large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245671
Filename
1459605
Link To Document