DocumentCode
3456621
Title
Feasibility study of a multiple beam SEM for a defect inspection
Author
Nakasuji, M. ; Yoshikawa, S. ; Satake, T. ; Noji, N.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
342
Lastpage
343
Keywords
Electron beams; Electron optics; Electrostatic measurements; Inspection; Lenses; Optical beams; Optical detectors; Particle beams; Scanning electron microscopy; Stimulated emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245636
Filename
1459618
Link To Document