Wide tuning-range resonant-frequency control by combining electromechanical softening and hardening springs

Author

Cuong Phu Le ; Halvorsen, Einar

Author_Institution

Dept. of Micro & Nano Syst. Technol., Vestfold Univ. Coll., Horten, Norway

fYear

2013

fDate

16-20 June 2013

Firstpage

1352

Lastpage

1355

Abstract

This paper presents a device concept for electrostatic resonators utilizing a combination of electromechanically softening and mechanically hardening springs in order to improve tuning capability and reach low values of the resonant frequency. The microscale device was designed for and fabricated in the SOIMUMPS process with a device-layer thickness of 25μm and an active area of 4×5mm². Measurements with base-excitation of the device demonstrate a large tuning range from about 1147Hz down to 120Hz and a maximum relative bandwidth exceeding 100%, e.g. 740Hz.

Keywords

electromechanical effects; electrostatic actuators; frequency control; hardening; micromechanical resonators; microsensors; silicon-on-insulator; softening; springs (mechanical); SOIMUMPS process; Si; electromechanical hardening spring; electromechanical softening spring; electrostatic resonator; electrostatic transducer; microscale device design; size 25 mum; tuning range resonant frequency control; Acceleration; Electrostatics; Force; Resonant frequency; Springs; Transducers; Voltage measurement; Electrostatic transducers; end-stops; hardening and softening springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627028

Filename

6627028