• DocumentCode
    3460242
  • Title

    Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film Dynamic Thickness Effect and Theory of Diffusion Reaction

  • Author

    Yan, Wang ; Jingjing, Sun ; Jianping, Xing ; Debin, Hong ; Nanwan, Qiu

  • Author_Institution
    Sch. of Math. & Syst. Sci., Shandong Univ., Jinan
  • fYear
    2006
  • fDate
    20-23 Aug. 2006
  • Firstpage
    1448
  • Lastpage
    1453
  • Abstract
    The rule of characteristic time varies with film thickness, gas concentration is given by experiment results. The diffusion reaction model of conductance response for porous gas sensing thin film is proposed; with solution and non-dimensional analyze the reaction diffusion equation, the rule of character time can be yielded. Using the method of combination of theoretical and experimental, the surface adsorption exponent gamma and adsorbing energy Ea are discussed
  • Keywords
    adsorption; diffusion; gas sensors; nanostructured materials; porous materials; thin films; adsorbing energy; conductance; film thickness; gas sensors; nanometal oxide; porous materials; reaction diffusion equation; surface adsorption; thin film; Electric variables measurement; Equations; Information science; Mathematics; Microelectronics; Physics; Sputtering; Sun; Transistors; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information Acquisition, 2006 IEEE International Conference on
  • Conference_Location
    Weihai
  • Print_ISBN
    1-4244-0528-9
  • Electronic_ISBN
    1-4244-0529-7
  • Type

    conf

  • DOI
    10.1109/ICIA.2006.305970
  • Filename
    4097903
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3460242