DocumentCode
3460336
Title
Electromechanical modelling of high power RF-MEMS switches with ohmic contact
Author
Tan, S.G. ; McErlean, E.P. ; Hong, J.-S. ; Cui, Z. ; Wang, L. ; Greed, R.B. ; Voyce, D.C.
Author_Institution
Dept. of Electr., Electron. & Comput. Eng., Heriot-Watt Univ., Edinburgh, UK
Volume
3
fYear
2005
fDate
4-6 Oct. 2005
Abstract
This paper presents a study of the behaviour of electrically actuated RF-MEMS switches with ohmic contact. We discuss about the relationship between the actuation voltage, displacement and the corresponding contact force experienced by the switch. We demonstrate the linear behaviour of the switch when factors such as width or length of the switch arm are varied. Experimental results for DC actuation are also presented.
Keywords
electromechanical effects; microswitches; ohmic contacts; DC actuation; RF-MEMS switches; actuation voltage; contact force; electromechanical model; ohmic contact; switch arm; Communication switching; Laboratories; Micromechanical devices; Ohmic contacts; Power engineering computing; Power semiconductor switches; Radiofrequency microelectromechanical systems; Silicon; Space technology; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2005 European
Print_ISBN
2-9600551-2-8
Type
conf
DOI
10.1109/EUMC.2005.1610223
Filename
1610223
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