Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching

Author

Ahn, Chong H. ; Ng, Eldwin Jiaqiang ; Hong, Vu A. ; Yang, Yi ; Lee, B.J. ; Ward, M.W. ; Kenny, Thomas W.

Author_Institution

Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

1723

Lastpage

1726

Abstract

In this paper, we show two methods for modifying the design of a Disk Resonating Gyroscope (DRG) to compensate for the mechanical anisotropy in single crystal silicon. This method is validated through experimental characterization of more than 70 different devices. With the proposed methods, the frequency split of the 250kHz DRG “wineglass” modes in single crystal silicon was reduced from >10kHz to as los as 96Hz without any electrostatic tuning. These results allow development of high-performance miniature DRGs tuned for degenerate-mode operation from high-quality crystalline silicon material.

Keywords

gyroscopes; micromechanical resonators; silicon; Si; degenerate mode operation; frequency split; geometric compensation; high quality crystalline silicon material; mechanical anisotropy compensation; mode matching; single crystal silicon disk resonating gyroscope; wineglass mode; Anisotropic magnetoresistance; Crystals; Encapsulation; Frequency measurement; Gyroscopes; Micromechanical devices; Silicon; (100) single crystal silicon; anisotropy; frequency split; gyroscope; mode-matching;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627119

Filename

6627119