Microfabricated spherical pressure sensing particles for pressure and flow mapping

Author

Yan Xie ; Banerjee, Nabaneeta ; Mastrangelo, Carlos H.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Utah, Salt Lake City, UT, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

1771

Lastpage

1774

Abstract

Arrays of hollow, vacuum-sealed microsphere particles were fabricated by deposition of a conformal polymer coating on isotropically-etched micro-molds. When released, the microspheres inflate or deflate under the application of external pressure. The particle deflection characteristics were characterized using optical spectral reflectance and light scattering methods. The observed spectral shift of the particle reflectance was ~200nm/MPa.

Keywords

flow sensors; light scattering; microfabrication; moulding; pressure sensors; arrays of hollow; conformal polymer coating; flow mapping; isotropically-etched micromolds; light scattering methods; microfabricated spherical pressure sensing particles; optical spectral reflectance; pressure mapping; vacuum-sealed microsphere particles; Atmospheric measurements; Optical device fabrication; Optical reflection; Optical resonators; Particle measurements; Reflectivity; Scattering; Micro-sphere; Optical resonator; Particle Image Manometry; pressure sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627131

Filename

6627131