• DocumentCode
    3461383
  • Title

    Microfabrication and characterization of fully programmable optical MEMS gratings with long low-stress micro-mirrors

  • Author

    Timotijevic, B. ; Tormen, M. ; Lockhart, Robert ; Lutzelschwab, M. ; Stanley, R.P. ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Canonica, Michael ; Noell, Wilfried

  • Author_Institution
    Swiss Centre of Electron. & Microtechnol. (CSEM), Neuchatel, Switzerland
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    137
  • Lastpage
    138
  • Abstract
    We have fabricated and characterized fully programmable MEMS diffraction gratings with long, low-stress, low cross-talk and optically flat micro-mirrors, which can be vertically displaced up to 0.7μm.
  • Keywords
    diffraction gratings; micro-optomechanical devices; micromirrors; optical fabrication; low-stress micromirrors; microfabrication; optically flat micromirrors; programmable optical MEMS gratings; Diffraction; Diffraction gratings; Gratings; Micromechanical devices; Mirrors; Optical crosstalk; Optical filters; MEMS; diffraction grating; micro-mirror;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031052
  • Filename
    6031052
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461383