• DocumentCode
    3461513
  • Title

    VOA-based optical MEMS accelerometer

  • Author

    Zandi, K. ; Jing Zou ; Wong, Bernard ; Kruzelecky, R.V. ; Peter, Yves-Alain

  • Author_Institution
    Dept. of Eng. Phys., Ecole Polytech. de Montreal, Montréal, QC, Canada
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    15
  • Lastpage
    16
  • Abstract
    A novel in-plane double silicon-on-insulator optical MEMS accelerometer based on variable optical attenuator is presented. It is designed for micro-satellite navigation applications and it uses multimode waveguides integrated with MEMS providing a compact and reliable device.
  • Keywords
    accelerometers; micro-optics; microsensors; optical attenuators; silicon-on-insulator; micro-satellite navigation; multimode waveguides; silicon-on-insulator optical MEMS accelerometer; variable optical attenuators; Accelerometers; Optical attenuators; Optical fiber sensors; Optical fibers; microelectromechanical systems (MEMS); optical accelerometer; silicon-on-insulator; variable optical attenuator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031059
  • Filename
    6031059
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461513