DocumentCode
3461635
Title
A high-frequency comb-actuated resonant MEMS scanner for microdisplays
Author
Gokce, S.K. ; Holmstrom, Sture ; Brown, Dean ; Davis, W.O. ; Urey, Hakan
Author_Institution
Koc Univ. Istanbul, Istanbul, Turkey
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
35
Lastpage
36
Abstract
A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
Keywords
micro-optomechanical devices; microdisplays; micromirrors; optical scanners; atmospheric pressure; high resolution microdisplays; high-frequency comb-actuated resonant MEMS scanner; multiframe geometry; torsional mirror; total-optical-scan-angle; Couplings; Damping; Electrostatics; Frequency response; Micromechanical devices; Mirrors; Resonant frequency; MEMS scanner; Torsional scanner; comb drive; display;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031064
Filename
6031064
Link To Document