• DocumentCode
    3462010
  • Title

    CO2 sensing by work function readout of ZnO based screen printed films

  • Author

    Pohle, R. ; Tawil, A. ; Mrotzek, C. ; Fleischer, M.

  • Author_Institution
    Corp. Technol., Siemens AG, Munich, Germany
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    2049
  • Lastpage
    2050
  • Abstract
    Work function readout of screenprinted polycrystalline ZnO-based layers is investigated for CO2 detection. Numerous sensing materials have been developed and applied to the GasFET for several target gases like NH3, NO2, CO and humidity [1]. Special emphasis has been placed on the development on sensing layers for CO2 detection [2], but the CO2 sensitive materials identified so far have drawbacks regarding delicate manufacturing, long term stability or need for heated operation. ZnO-based materials may overcome these drawbacks, as the first results shown here will demonstrate.
  • Keywords
    II-VI semiconductors; carbon compounds; field effect transistors; gas sensors; thick films; wide band gap semiconductors; work function; zinc compounds; CO2; CO2 sensing; ZnO; delicate manufacturing; gasFET; heated operation; long term stability; screen printed films; screenprinted polycrystalline ZnO-based layers; work function readout; Glass; Humidity; Kelvin; Temperature sensors; Zinc oxide; CO2 sensing; Kelvin Probe; work function; zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6627201
  • Filename
    6627201