Study on dynamic characterization of a shunt capacitive RF MEMS switch

Author

Hou, Zhihao ; Liu, Zewen ; Lei, Xiaofeng ; Hu, Guangwei ; Liu, Litian ; Li, Zhijian

Author_Institution

Dept. of Microelectron. & Nanoelectron., Tsinghua Univ., Beijing

fYear

2006

fDate

Oct. 2006

Firstpage

584

Lastpage

586

Abstract

Method and result of dynamic characterization of a shunt capacitive RF MEMS switch is presented. The measurement system is based on an optical surface profiler, using which the displacement and action time can be obtained directly. The main structure of the RF MEMS switch is consisted of metallic membrane and serpentine support beams. It has very good isolation up to 46dB @19.6GHz. Measurement results show that the whole action time of the fabricated RF MEMS switch is in order of 100mus, and the pull-down time is 20mus, the recover time is about 80mus

Keywords

microswitches; microwave switches; 100 mus; 19.6 GHz; 20 mus; metallic membrane; optical surface profiler; serpentine support beams; shunt capacitive RF MEMS switch; Biomembranes; Communication switching; Electrodes; Electrostatic measurements; Optical switches; Radio frequency; Radiofrequency microelectromechanical systems; Telecommunication switching; Time measurement; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0160-7

Electronic_ISBN

1-4244-0161-5

Type

conf

DOI

10.1109/ICSICT.2006.306382

Filename

4098174