• DocumentCode
    3468703
  • Title

    Simple valves on a pdms microchip bonded via patterned oxygen plasma

  • Author

    Kawai, T. ; Moriguchi, H. ; Tanaka, Y.

  • Author_Institution
    Quantitative Biol. Center, RIKEN, Suita, Japan
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    1782
  • Lastpage
    1785
  • Abstract
    The simplest form of microfluidic valve is proposed with detailed working mechanism. Conventional on-chip valves are requiring a multiple layers of microchip with complicated fluidic pattern and/or complicated external control system. In contrast, our developed valve can be fabricated in a bilayer microchip with a simple pattern, two channels and a wall separating them. Our valve fabrication was based on a plasma patterning method with a sacrificial aluminum layer, which shield the oxygen plasma activation only in the aimed position of the substrate. This approach is more robust than the conventional "plasma deactivation" approach based on the chemical patterning via micro-contact printing. For the valve regulation, no external control line is necessary but a weak pressure to the injection channel. Although our valve has no simpler structure than that of the hydrophobic valve which has ever been the simplest, our valve has a significant advantage in the repeatable utility. Due to its simplicity, moreover, long term injection more than 120 min was easily and precisely carried out. These highest simplicity and performance are quite suitable for the large integration and mass production of complicated lab-on-a-chip system for the application to biological research.
  • Keywords
    aluminium; bioMEMS; lab-on-a-chip; microfluidics; microvalves; oxygen; plasma applications; soft lithography; Al; O2; PDMS microchip; aluminum layer; bilayer microchip; biological research; chemical patterning; external control system; fluidic pattern; hydrophobic valve; injection channel; lab-on-a-chip system; microcontact printing; microfluidic valve; on-chip valves; oxygen plasma activation; patterned oxygen plasma; plasma deactivation; plasma patterning method; polydimethylsiloxane; valve regulation; Aluminum; Fluorescence; Glass; Microchannels; Plasmas; Substrates; Valves; Microfluidics; Microvalve; Oxygen plasma; PDMS; Patterning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181292
  • Filename
    7181292