• DocumentCode
    3469943
  • Title

    Study of various fittings used on bulk chemical supply system

  • Author

    Chien, C.C. ; Chang, C.N. ; Lien, S.S. ; Hsiao, H.C. ; Tsai, K.T. ; Chang, Y.I.

  • Author_Institution
    TSMC(Taiwan Semicond. Manuf. Co.), Hsinchu, Taiwan
  • fYear
    2013
  • fDate
    6-6 Sept. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    When selecting a fluoropolymer fitting design to be used in ultra high-purity chemical applications, decision makers must consider different performance characteristics. A recent study was conducted that measured key fitting attributes, such as fitting pull-out force, cleanliness and assembly time. The study compared commercially available nonwetted insert, flare, and wetted insert style fittings. The methodologies employed and the test results are detailed in this paper.
  • Keywords
    fitting (assembly); polymers; semiconductor industry; assembly time; bulk chemical supply system; cleanliness; flare style fittings; fluoropolymer fitting design; nonwetted insert; pull-out force fitting; semiconductor industry; wetted insert style fittings; Conductivity; Electron tubes; Heating; Joints; Valves; Fitting; Flare; Insert;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    e-Manufacturing & Design Collaboration Symposium (eMDC), 2013
  • Conference_Location
    Hsinchu
  • Type

    conf

  • DOI
    10.1109/eMDC.2013.6756058
  • Filename
    6756058