DocumentCode
3469943
Title
Study of various fittings used on bulk chemical supply system
Author
Chien, C.C. ; Chang, C.N. ; Lien, S.S. ; Hsiao, H.C. ; Tsai, K.T. ; Chang, Y.I.
Author_Institution
TSMC(Taiwan Semicond. Manuf. Co.), Hsinchu, Taiwan
fYear
2013
fDate
6-6 Sept. 2013
Firstpage
1
Lastpage
4
Abstract
When selecting a fluoropolymer fitting design to be used in ultra high-purity chemical applications, decision makers must consider different performance characteristics. A recent study was conducted that measured key fitting attributes, such as fitting pull-out force, cleanliness and assembly time. The study compared commercially available nonwetted insert, flare, and wetted insert style fittings. The methodologies employed and the test results are detailed in this paper.
Keywords
fitting (assembly); polymers; semiconductor industry; assembly time; bulk chemical supply system; cleanliness; flare style fittings; fluoropolymer fitting design; nonwetted insert; pull-out force fitting; semiconductor industry; wetted insert style fittings; Conductivity; Electron tubes; Heating; Joints; Valves; Fitting; Flare; Insert;
fLanguage
English
Publisher
ieee
Conference_Titel
e-Manufacturing & Design Collaboration Symposium (eMDC), 2013
Conference_Location
Hsinchu
Type
conf
DOI
10.1109/eMDC.2013.6756058
Filename
6756058
Link To Document