Modeling of Nano-resonator Testing System by Lumped Parameter Method

Author

Han, Xiang ; Wu, Wengang ; Fan, Jie ; Yan, Guizhen ; Hao, Yilong

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing

fYear

2006

fDate

23-26 Oct. 2006

Firstpage

1404

Lastpage

1406

Abstract

An electromechanical model for nano-beam resonator is proposed, considering simultaneously the residual stress, the nonlinear stretching effect and the fringing field effect. With some reasonable simplification, the analytical expression is derived from Euler equation. Based on the parameters extracted from the model, lumped parameter method is introduced to analyze the dynamic characterization of the whole testing system. The phase and amplitude of the output are detected from simulations and more precise resonance prediction is available. Based on the model and testing system, the influence of the parasitic effect is discussed

Keywords

circuit testing; internal stresses; lumped parameter networks; micromechanical resonators; stress effects; Euler equation; dynamic characterization; electromechanical model; fringing field effect; lumped parameter method; nanobeam resonator; nanoresonator testing system; nonlinear stretching effect; parasitic effect; residual stress effect; Capacitance; Circuit testing; Microelectronics; Nanoelectromechanical systems; Nonlinear dynamical systems; Nonlinear equations; Residual stresses; Resonance; Resonant frequency; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0160-7

Electronic_ISBN

1-4244-0161-5

Type

conf

DOI

10.1109/ICSICT.2006.306197

Filename

4098423