DocumentCode
3469985
Title
Study of Fab tool waste drain separation and reduction application in Bump process
Author
Liu, K.C. ; Chang, C.N. ; Chen, W.M. ; Lan, J.K. ; Lien, Tony ; Lu, Jun ; Wei-Jen Huang ; Tseng, E. ; Tu, C.J. ; Lai, L.
Author_Institution
Taiwan Semicond. Manuf. Co., Ltd., Hsinchu, Taiwan
fYear
2013
fDate
6-6 Sept. 2013
Firstpage
1
Lastpage
4
Abstract
All chemical reduction were achieved by Background study of chemicals used and discharged behavior in Fab tools, Waste drain concentration analysis, Fab tools adjustment of the PM procedure, Cu free etching chemical replacement, Theoretical waste vs. Actual waste, Waste separation based on recycling criteria to meet the maximum benefit, Total 75% waste chemical to be reduced effectively.
Keywords
etching; recycling; semiconductor industry; separation; waste disposal; Fab tool waste drain reduction; Fab tool waste drain separation; bump process; chemical reduction; copper free etching chemical replacement; recycling criteria; semiconductor industry; tools adjustment; waste chemical; waste drain concentration analysis; waste separation; Chemicals; Hafnium; Joints; Lead; Maintenance engineering; Nickel; Recycling; Bump process; Reduction; Waste drain; separation;
fLanguage
English
Publisher
ieee
Conference_Titel
e-Manufacturing & Design Collaboration Symposium (eMDC), 2013
Conference_Location
Hsinchu
Type
conf
DOI
10.1109/eMDC.2013.6756060
Filename
6756060
Link To Document