A 3-axis surface micromachined /spl Sigma//spl Delta/ accelerometer

Author

Lemkin, M.A. ; Ortiz, M.A. ; Wongkomet, N. ; Boser, B.E. ; Smith, J.H.

Author_Institution

California Univ., Berkeley, CA, USA

fYear

1997

fDate

8-8 Feb. 1997

Firstpage

202

Lastpage

203

Abstract

A monolithic 3-axis surface micromachined accelerometer with capacitive sense and feedback circuitry uses three separate proof masses to measure acceleration. Each proof mass has its own set of interface circuitry, all of which are coordinated by an on-chip master clock. By including x-, y-, and z-axis sensors on one chip, this accelerometer provides a single-chip solution for measuring three ofthe six degrees of freedom needed in an inertial measurement unit. The sensor chip is implemented in 2 /spl mu/m CMOS technology.

Keywords

CMOS integrated circuits; accelerometers; capacitance measurement; feedback; micromachining; microsensors; sigma-delta modulation; /spl Sigma//spl Delta/ accelerometer; 2 micron; 3-axis surface micromachined accelerometer; 5 V; CMOS sensor chip; capacitive sense circuitry; feedback circuitry; inertial measurement unit; interface circuitry; monolithic accelerometer; onchip master clock; sigma-delta feedback loop; Accelerometers; Micromechanical devices; Monolithic integrated circuits; Solid state circuits; Timing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 1997. Digest of Technical Papers. 43rd ISSCC., 1997 IEEE International

Conference_Location

San Francisco, CA, USA

ISSN

0193-6530

Print_ISBN

0-7803-3721-2

Type

conf

DOI

10.1109/ISSCC.1997.585333

Filename

585333