A Synchronous Drive Control Scheme Based on Neural Networks for a Novel XY-table

High performance XY-table is commonly incorporated into IC manufacturing and packaging equipments. In order to achieve higher acceleration, a novel XY positioning table synchronously driven by one-side dual linear motors is proposed. The redundant drive system commonly suffers from synchronous drive precision problem at high speed and acceleration rates. In this paper, the dynamic model of dual linear motors redundant drive system along X-axis direction is given, and synchronous drive precision can be assured by using a synchronous control scheme. This scheme has two model reference adaptive controllers and a synchronous error compensator based on neural networks. Simulation results are provided to manifest the control system has better static and dynamic performance and higher synchronous drive precision at a morn than 10g (g=9.81m/s²) high acceleration profile motion.