Microelectromechanical Longitudinal Resonator for Frequency Reference Applications

Microelectromechanical system (MEMS) based resonators provide an attractive alternative for bulky quartz-crystals used in modern day communication systems due to their small size, low cost batch fabrication and compatibility with complementary metal oxide semiconductor (CMOS). This paper describes the design, simulation and fabrication of a CMOS compatible micromechanical beam resonator operating in longitudinal bulk mode. An improved design which reduces the motional resistance is also proposed. The resonators were fabricated using surface micromachined polysilicon and electrodeposited nickel as structural material.