Design and Simulation of Structurally Decoupled 4-DOF MEMS Vibratory Gyroscope

This paper presents design of a structurally decoupled 4-DOF MEMS vibratory gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DOF drive mode oscillator and 2-DOF sense mode oscillator to achieve large gain. The device performance is verified through system level simulations in CoventorWare^® ARCHITECT3D (SABER) platform, considering 10 μm thick nickel as structural layer. A wide operational bandwidth of 704 Hz is achieved. Moreover to verify the device performance under the application of angular velocity, a rate table simulation is carried out which resulted in sense mass displacement of 136.2 nm corresponding to the rotation induced Coriolis force at actuation voltage of 20 V_ac and 40 V_dc with angular rotation of 35 rad/s.