DocumentCode
3478589
Title
Optimal design of high-sensitivity pressure sensor with peninsula-structured diaphragm
Author
Xian Huang ; Danqi Zhao ; Jun He ; Fang Yang ; Dacheng Zhang
Author_Institution
Shenzhen Grad. Sch., Peking Univ., Beijing, China
fYear
2013
fDate
3-5 June 2013
Firstpage
1
Lastpage
2
Abstract
A novel high-sensitivity pressure sensor with peninsula structured diaphragm was designed to avoid the nonlinearity problem in the area of low pressure sensing. Finite element analysis (FEA) was applied to optimize the sensor design. Sensitivity was improved by nearly 40% by the optimization of piezoresistors in the peninsula. The proposed design exhibited high linearity and high sensitivity synthetically compared with the classical designs based on flat diaphragms.
Keywords
diaphragms; finite element analysis; piezoresistive devices; pressure sensors; finite element analysis; high-sensitivity pressure sensor; linearity; optimal design; optimization; peninsula-structured diaphragm; piezoresistors; Educational institutions; Loading; Optimization; Piezoresistance; Piezoresistive devices; Sensitivity; Stress; finite element analysis; high sensitivity and linearity; peninsula structure; piezoresistive pressure sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid-State Circuits (EDSSC), 2013 IEEE International Conference of
Conference_Location
Hong Kong
Type
conf
DOI
10.1109/EDSSC.2013.6628228
Filename
6628228
Link To Document