• DocumentCode
    3481446
  • Title

    3D simulation code for the modelling of beam line optics

  • Author

    Foad, Majeed A. ; Harrison, Bernard F. ; Marin, Tony

  • Author_Institution
    Implant Div., Appl. Mater., Horsham, UK
  • fYear
    1996
  • fDate
    16-21 Jun 1996
  • Firstpage
    364
  • Lastpage
    366
  • Abstract
    The use of ion optics simulation codes is becoming increasingly important for rapid design and development of ion optical components. In simulating ion beams with no cylindrical symmetry, e.g. ribbon beams, the use of 3D codes is particularly advantageous since end effects can be taken into account. In this paper, the KOBRA 3D simulation code has been used to simulate the production of decelerated beams produced using a PI9500xR beam line. Good qualitative agreement has been obtained between the experimental data and the theoretical simulation. The paper also highlights the benefits of using simulation codes in helping to understand the behaviour of the ion beam within the ion optical system
  • Keywords
    beam handling equipment; ion beams; ion optics; 3D simulation code; KOBRA; PI9500xR beam line; decelerated beam; ion beam; ion optics; modelling; ribbon beam; Boron; Computational modeling; Electrodes; Ion beams; Optical beams; Optical materials; Particle beam optics; Resistors; Space charge; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology. Proceedings of the 11th International Conference on
  • Conference_Location
    Austin, TX
  • Print_ISBN
    0-7803-3289-X
  • Type

    conf

  • DOI
    10.1109/IIT.1996.586296
  • Filename
    586296