Microwave straight edge resonator (SER) on silicon membrane

Author

Sajin, George ; Matei, Elena ; Dragoman, Mircea

Author_Institution

Nat. Inst. of Res. & Dev. for Microtechnol., Bucharest, Romania

Volume

1

fYear

1999

fDate

1999

Firstpage

283

Abstract

The work presents modelling of a microwave straight edge resonator (SER) designed on a silicon membrane. The aim of this approach is to obtain a miniaturised device, integrable in a planar microwave circuit. The design and S parameters measurements of MSW transducers on silicon membrane are presented. Modelling a microwave SER having a silicon membrane as substrate demonstrates the possibility to realise such frequency swept microwave devices. Using silicon membranes to support these devices offers the advantage of miniaturisation, with important openings toward microwave circuit integration on semiconductor substrate

Keywords

MMIC; S-parameters; cavity resonators; elemental semiconductors; magnetic microwave devices; magnetostatic wave devices; membranes; microstrip resonators; silicon; MSW transducers; S parameters; Si; design; frequency swept microwave devices; microwave circuit integration; microwave straight edge resonator; miniaturised device; modelling; planar microwave circuit; semiconductor substrate; silicon membrane; Biomembranes; Detectors; Ferrites; Magnetostatic waves; Microstrip; Microwave devices; Microwave integrated circuits; Silicon; Substrates; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International

Conference_Location

Sinaia

Print_ISBN

0-7803-5139-8

Type

conf

DOI

10.1109/SMICND.1999.810517

Filename

810517