A perturbation finite element method for modeling electrostatic MEMS without remeshing

Author

Boutaayamou, Mohamed ; Sabariego, Ruth V. ; Dular, Patrick

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of Liege, Liege

fYear

2008

fDate

20-23 April 2008

Firstpage

1

Lastpage

5

Abstract

This paper deals with the coupled electrostatic- mechanical analysis of electrostatically actuated MEMS. An iterative perturbation procedure in conjunction with the finite element method is used to solve the coupled problem without the need of remeshing the whole electric domain. The method offers the advantage of overcoming degenerated finite elements in the mesh of some electric regions where the deflection of the MEMS moving parts is critical. The actuation of such systems is achieved by applying either an electric voltage or a global charge.

Keywords

electrostatics; finite element analysis; micromechanical devices; perturbation techniques; coupled electrostatic-mechanical analysis; electrostatic MEMS; electrostatically actuated; iterative perturbation procedure; perturbation finite element method; Conductors; Electrodes; Electrostatic analysis; Finite element methods; Geometry; Iterative methods; Mesh generation; Micromechanical devices; Microstructure; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on

Conference_Location

Freiburg im Breisgau

Print_ISBN

978-1-4244-2127-5

Electronic_ISBN

978-1-4244-2128-2

Type

conf

DOI

10.1109/ESIME.2008.4525012

Filename

4525012