Electromechanical resonator detection enhancement by the use of a movable electrode

This paper deals with a new capacitive resonator design presenting a movable electrode to enhance resonator performances. Mechanisms and coventor finite element method (FEM) simulations to design such component are detailed. Firstly we compared FEM simulations with RF measurements on a 67.35 MHz clamped-clamped (CC) flexural beam resonator with a fixed electrode to validate simulations. Then, simulations predict more than 80% of motional resistance decrease, which implies output signal enhancement, by the use of the movable electrode design. This component could be realized using silicon on nothing (SoN) process.