DocumentCode
3490679
Title
Modeling of the effect of silicon needles sharpening during their thermal oxidation
Author
Kalinin, S.V. ; Egorkin, Andrey V.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk, Russia
fYear
2012
fDate
2-4 Oct. 2012
Firstpage
4
Lastpage
6
Abstract
The thermal oxidation model developed using SProcess TCAD SenTaurus is considered. The cone-shaped silicon needle is used as a test structure. Simulation results show that the proposed model describes the phenomenon of the needle sharpening during their thermal oxidation in accordance with the experimental data. It is shown that for adequate modeling the consideration of some nonlinear mechanical effects is required.
Keywords
elemental semiconductors; heat treatment; needles; oxidation; silicon; technology CAD (electronics); SProcess TCAD SenTaurus; Si; cone-shaped silicon needle; nonlinear mechanical effect; silicon needles sharpening; thermal oxidation model; Data models; Educational institutions; Electron devices; Needles; Oxidation; Silicon; Simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electronics Instrument Engineering (APEIE), 2012 11th International Conference on
Conference_Location
Novosibirsk
Print_ISBN
978-1-4673-2842-5
Type
conf
DOI
10.1109/APEIE.2012.6628920
Filename
6628920
Link To Document