Equivalent electrical model for quartz vibrating gyroscope

Author

Wang, Qingyi ; Chen, Weiping ; Yin, Liang ; Liu, Xiaowei ; Zhou, Zhiping

Author_Institution

MEMS Center, Harbin Inst. of Technol., Harbin, China

fYear

2012

fDate

23-25 Aug. 2012

Firstpage

501

Lastpage

504

Abstract

Quartz vibrating gyroscope is a kind of MEMS angular rate sensor with advantages in resolution, stability, reliability, volume, weight and cost. In order to make full use of the virtues of this MEMS sensor, chip integration for the sensor becomes necessary. As the equivalent electrical model for the sensor is a prerequisite for design of its interface ASIC, the equivalent electrical model of quartz vibrating gyroscope is presented in this work. Hybrid simulation of the sensitive components and interface circuit with HSPICE is achieved by this model to improve the yield beneficially. Simulation results show that this model can realize function verification for the quartz vibrating gyroscope.

Keywords

application specific integrated circuits; gyroscopes; microsensors; HSPICE; MEMS angular rate sensor; MEMS sensor; chip integration; equivalent electrical model; hybrid simulation; interface ASIC; quartz vibrating gyroscope; Application specific integrated circuits; Electrodes; Gyroscopes; Integrated circuit modeling; Micromechanical devices; Simulation; Vibrations; ASIC; Euqivalent electrical model; quartz vibrating gyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronics and Microelectronics (ICOM), 2012 International Conference on

Conference_Location

Changchun, Jilin

Print_ISBN

978-1-4673-2638-4

Type

conf

DOI

10.1109/ICoOM.2012.6316325

Filename

6316325