Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles

Author

Asadnia, Mohsen ; Kottapalli, Ajay Giri Prakash ; Shen, Zhe ; Miao, J.M. ; Barbastathis, George ; Triantafyllou, Michael S.

Author_Institution

Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2013

fDate

20-24 Jan. 2013

Firstpage

126

Lastpage

129

Abstract

In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm² and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.

Keywords

autonomous underwater vehicles; diaphragms; microfabrication; microsensors; piezoelectric devices; pressure sensors; sensor arrays; flexible MEMS pressure sensor array; marine vehicle; maritime vehicle; microfabrication; packaging; passive fish-like underwater sensor; piezoelectric microdiaphragm pressure sensor array; situational awareness; underwater object; underwater sensing application; zero powered MEMS pressure sensor array; Electrodes; Fabrication; Marine animals; Micromechanical devices; Sensor arrays; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Conference_Location

Taipei

ISSN

1084-6999

Print_ISBN

978-1-4673-5654-1

Type

conf

DOI

10.1109/MEMSYS.2013.6474193

Filename

6474193