Coupled bulk acoustic wave resonator filters: key technology for single-to-balanced RF filters

Author

Fattinger, G.G. ; Aigner, R. ; Nessler, W.

Author_Institution

Infneon Technol. AG, Germany

Volume

2

fYear

2004

fDate

6-11 June 2004

Firstpage

927

Abstract

Coupled Resonator Filters (CRF) are a new type of Bulk Acoustic Wave (BAW) device in which two piezoresonators are stacked on top of each other in a way that a certain degree of acoustic interaction occurs. CRFs feature complete galvanic isolation between input and output and thus enable to offer BAW filters with mode-conversion (single-ended to balanced) as well as impedance transformation. The basic concept behind these devices is reviewed. The size of a CRF BAW filter is excitingly small as compared to SAW filters. First experimental results for CRFs operating at 1.8 GHz which have been manufactured at Infineon Technologies will be presented. Certain manufacturing issues are discussed and measurements of the temperature coefficient TCF are shown.

Keywords

acoustic resonator filters; bulk acoustic wave devices; radiofrequency filters; 1.8 GHz; BAW device; acoustic interaction; acoustic wave resonator filters; bulk acoustic wave device; coupled resonator filters; galvanic isolation; impedance transformation; mode conversion filters; piezoresonators; single balanced RF filters; temperature coefficient measurements; Acoustic devices; Acoustic waves; Galvanizing; Impedance; Isolation technology; Manufacturing; Radio frequency; Resonator filters; SAW filters; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2004 IEEE MTT-S International

ISSN

0149-645X

Print_ISBN

0-7803-8331-1

Type

conf

DOI

10.1109/MWSYM.2004.1339126

Filename

1339126