Pulse-Type Hardware Inhibitory Neural Networks for MEMS micro robot using CMOS technology

This paper presents the locomotion generator of MEMS (Micro Electro Mechanical Systems) micro robot. The locomotion generator demonstrates the locomotion of the micro robot, controlled by the P-HINN (Pulse-Type Hardware Inhibitory Neural Networks). P-HINN generates oscillatory patterns of electrical activity such as living organisms. Basic components are the cell body models and inhibitory synaptic models. P-HINN has the same basic features of biological neurons such as threshold, refractory period, spatio-temporal summation characteristics and enables the generation of continuous action potentials. P-HINN was constructed by MOSFETs, can be integrated by CMOS technology. Same as the living organisms P-HINN realized the robot control without using any software programs, or A/D converters. The size of the micro robot fabricated by the MEMS technology was 4×4×3.5 mm. The frame of the robot was made of silicon wafer, equipped with the rotary type actuators, the link mechanisms and 6 legs. The MEMS micro robot emulated the locomotion method and the neural networks of the insect by the rotary type actuators, link mechanisms and P-HINN. As a result, we show that P-HINN can control the forward and backward locomotion of fabricated MEMS micro robot, and also switched the direction by inputting the external trigger pulse. The locomotion speed was 19.5 mm/min and the step width was 1.3 mm.