Optimization of two-element flow sensors by numerical simulations

Author

Nagata, Mitsuhiko ; Stevens, Malcolm ; Swart, Nicholas ; Dravia, Thngaraj ; Nathan, Arokia

Author_Institution

Control Products. Div., Yamatake Corp, Kanagawa, Japan

Volume

1

fYear

1999

fDate

1999

Firstpage

373

Abstract

Simulation and measurement results are presented for a two-element boundary layer flow sensor fabricated using silicon semiconductor processing and micromachining technologies. The sensor is located on a thermally isolated membrane and utilizes platinum-based resistive heating and sensing elements. Device optimization is based on quasi-3D numerical solutions of the electrothermal equations governing heat transport. We investigate the effects of geometrical non-idealities on the output response and offset. The results corroborate well with measurement data for a large range of operating voltages and flow velocities

Keywords

boundary layers; differential equations; flowmeters; geometry; heat transfer; heating elements; membranes; micromachining; microsensors; numerical analysis; optimisation; semiconductor technology; Pt; Si; device optimization; electrothermal equations; flow velocity; geometrical nonidealities; heat transport; measurement data; micromachining; offset; operating voltage; output response; quasi-3D numerical simulations; resistive heating elements; resistive sensing elements; semiconductor processing; thermally isolated membrane; two-element boundary layer flow sensor; Biomembranes; Electrothermal effects; Fluid flow measurement; Heating; Isolation technology; Micromachining; Numerical simulation; Silicon; Thermal resistance; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies and Factory Automation, 1999. Proceedings. ETFA '99. 1999 7th IEEE International Conference on

Conference_Location

Barcelona

Print_ISBN

0-7803-5670-5

Type

conf

DOI

10.1109/ETFA.1999.815379

Filename

815379