DocumentCode
350498
Title
Enhancement of debris attachment in phase-shifted ultrashort-pulse laser ablation
Author
Toyoda, K. ; Masagaki, A. ; Morimoto, N. ; Sato, T.
Author_Institution
Dept. of Appl. Electron., Sci. Univ. of Tokyo, Japan
Volume
3
fYear
1999
fDate
Aug. 30 1999-Sept. 3 1999
Firstpage
690
Abstract
A 130fs laser pulse in which half of beam cross-section is phase-shifted regarding the other half carry out enhancement of debris attachment along diameter and periodical deposition corresponding to intensity variation due to Fresnel diffraction. The phase-shifted ultra-short laser pulsed was used to ablate the metallic targets. The phase shift is accomplished by using a phase-edge mirror with a step of Al coating with a height of a quarter wavelength of laser light. An abrupt intensity change was obtained by the phase-shift.
Keywords
laser ablation; Al coating; Fresnel diffraction; debris attachment enhancement; intensity variation; periodical deposition; phase-edge mirror; phase-shifted ultrashort-pulse laser ablation; Electronics industry; Industrial electronics; Laser ablation; Laser beams; Laser theory; Optical materials; Optical pulses; Pulsed laser deposition; Toy industry; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1999. CLEO/Pacific Rim '99. The Pacific Rim Conference on
Conference_Location
Seoul, South Korea
Print_ISBN
0-7803-5661-6
Type
conf
DOI
10.1109/CLEOPR.1999.817784
Filename
817784
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