DocumentCode
3505930
Title
Step-up voltage converter for mems actuators by piezoelectric transformers
Author
Francois, Pigache ; Marek, Pokorny ; Marc, Cousineau ; Bertrand, Nogarede
Author_Institution
LAPLACE, Univ. de Toulouse, Toulouse, France
fYear
2009
fDate
3-5 Nov. 2009
Firstpage
889
Lastpage
894
Abstract
This paper is about the validation of minimal electronic structure developed around piezoelectric transformer for high voltage mems supply. High voltage and compactness are main requirements leading to the development of electronic circuit. The selected solution is discussed and experimentally validated by a first prototype.
Keywords
high-voltage techniques; microactuators; piezoelectric devices; power convertors; power transformers; electronic circuit; high voltage mems supply; mems actuators; minimal electronic structure; piezoelectric transformers; step-up voltage converter; Charge pumps; Electronic circuits; Electrostatic actuators; Frequency; Lithography; Low voltage; Packaging; Piezoelectric actuators; Pulse width modulation converters; Transformers;
fLanguage
English
Publisher
ieee
Conference_Titel
Industrial Electronics, 2009. IECON '09. 35th Annual Conference of IEEE
Conference_Location
Porto
ISSN
1553-572X
Print_ISBN
978-1-4244-4648-3
Electronic_ISBN
1553-572X
Type
conf
DOI
10.1109/IECON.2009.5415036
Filename
5415036
Link To Document