DocumentCode
3506995
Title
Study of optimized deposition of thin film in DC magnetron sputtering and measuring the surface conductivity by four point probe and Hall effect
Author
Mahmoudzadeh, Mahdi ; Bahadori, F. ; Ghoranneviss, Mahmood
Author_Institution
Plasma Phys. Res. Lab., Tehran, Iran
fYear
2004
fDate
1-1 July 2004
Firstpage
302
Abstract
Summary form only given. In our investigation thin films of copper and brass were prepared by DC magnetron sputtering and coated on flat glasses. The effect of the thickness of brass and copper on electrical and optical properties was studied. The result shows that the resistively of thin films is a function of applied voltage. Furthermore it shows that the decrease in resistively with increased thickness is due to an increase in carrier concentration with increased film thickness.
Keywords
Hall effect; brass; carrier density; copper; electrical resistivity; metallic thin films; sputter deposition; sputtered coatings; surface conductivity; Cu; CuZn; DC magnetron sputtering; Hall effect; brass; carrier concentration; copper; electrical properties; flat glass; four point probe; optical properties; surface conductivity; thin film deposition; Conductivity measurement; Copper; Glass; Hall effect; Optical films; Physics; Plasma measurements; Plasma properties; Probes; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. The 31st IEEE International Conference on
Conference_Location
Baltimore, MD, USA
ISSN
0730-9244
Print_ISBN
0-7803-8334-6
Type
conf
DOI
10.1109/PLASMA.2004.1339979
Filename
1339979
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