• DocumentCode
    3508420
  • Title

    Nonplanar silicon strain sensors

  • Author

    Bower, R.W. ; Spencer, R.R. ; Lee, D.D.

  • Author_Institution
    California Univ., Davis, CA, USA
  • fYear
    1988
  • fDate
    6-9 June 1988
  • Firstpage
    39
  • Lastpage
    42
  • Abstract
    Variations of conventional thin-membrane strain sensors are described which use a series of anisotropic etches on
  • Keywords
    electric sensing devices; elemental semiconductors; pressure transducers; silicon; strain measurement; Si; V-grooves; fabrication; nonplanar strain sensor; pressure-sensor diaphragm; series of anisotropic etches; strain characteristics; Anisotropic magnetoresistance; Biomembranes; Capacitive sensors; Etching; Fabrication; MOS devices; MOSFETs; Piezoresistance; Sensor phenomena and characterization; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE
  • Conference_Location
    Hilton Head Island, SC, USA
  • Type

    conf

  • DOI
    10.1109/SOLSEN.1988.26428
  • Filename
    26428
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3508420