DocumentCode

3515355

Title

New UV lamp sources for thin film deposition

Author

Boyd, I.W.

fYear

1995

fDate

10-14 July 1995

Firstpage

131

Keywords

Bandwidth; Frequency; Gas lasers; Lamps; Laser tuning; Optical films; Optical pulses; Pulse amplifiers; Ring oscillators; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-2400-5

Type

conf

DOI

10.1109/CLEOPR.1995.527025

Filename

527025