Microfabrication activities at the University of Louisville

Author

Walsh, Kevin ; Hanley, Thomas ; Pitts, Karl ; Hensel, Douglas ; Hernandez, Jonathan ; Crain, Mark ; Cole, Jason

Author_Institution

Speed Sci. Sch., Louisville Univ., KY, USA

fYear

1997

fDate

20-23 Jul 1997

Firstpage

26

Lastpage

32

Abstract

This paper describes the new microfabrication effort presently underway at the University of Louisville. A 1500 square foot class 100/1000 cleanroom facility was completed in the 1997 Spring semester. The cleanroom contains a wide spectrum of microfabrication processing and test equipment. The new lab supports a broad range of interdisciplinary research projects and will be utilized in the upcoming 1997 Fall semester for a new NSF-sponsored undergraduate course in microfabrication. Details of the cleanroom and ongoing fabrication activities at the University of Louisville are presented

Keywords

clean rooms; educational courses; electronic engineering education; integrated circuit technology; laboratories; University of Louisville; cleanroom facility; microfabrication activities; undergraduate course; Art; Educational institutions; Fabrication; Floors; Foot; History; Laboratories; NASA; Springs; Test equipment;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Conference_Location

Rochester, NY

ISSN

0749-6877

Print_ISBN

0-7803-3790-5

Type

conf

DOI

10.1109/UGIM.1997.616674

Filename

616674