DocumentCode
3521525
Title
Micro-optic diffractive components fabricated by electron-beam lithography
Author
Shiono, T.
fYear
1995
fDate
10-14 July 1995
Firstpage
157
Keywords
High speed optical techniques; Integrated optics; Lenses; Lithography; Microoptics; Optical diffraction; Optical reflection; Optical sensors; Optical waveguides; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.527071
Filename
527071
Link To Document