Electron ablation as a method of condensed matter surface profiling

As is known, laser ablation is widely used in time-of-flight mass spectrometry as well as in modern micro and nanoelectronics, microelectromechanics for structural surface modification and profiling of condensed substances. In the present work the phenomenon of ablation is treated as a fast process of phase bound-free transition in excited or ionized structural elements (atoms, molecules) of condensed substance exposed to intense corpuscular radiation, in particular, intense electron fluxes. It is known that interaction of a substance with intense either laser or electron beams exhibits some common regular features, which have not yet been interpreted unambigously.