DocumentCode
3530129
Title
Etching characteristics of nuclear-reactor- simulated metal oxide films by pulsed Nd: YAG laser abla
Author
Sate, S. ; Shimizu, K. ; Ishide, T. ; Maruyama, T.
fYear
1995
fDate
10-14 July 1995
Firstpage
230
Keywords
Annealing; Chemical lasers; Corrosion; Decontamination; Etching; Gas lasers; Laser ablation; Neodymium; Optical pulses; Polarization;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-2400-5
Type
conf
DOI
10.1109/CLEOPR.1995.527183
Filename
527183
Link To Document