DocumentCode
3534317
Title
Fast optical phased array with ultra-lightweight high-contrast-grating mirrors
Author
Yoo, Byung-Wook ; Chan, Trevor ; Megens, Mischa ; Sun, Tianbo ; Yang, Weijian ; Rao, Frank ; Chang-Hasnain, Connie ; Horsley, David A. ; Wu, Ming C.
Author_Institution
Univ. of California, Berkeley, CA, USA
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
144
Lastpage
145
Abstract
We report an optical phased array (OPA) using high-contrast-grating (HCG) as an electrostatically actuated mirror for the purpose of free space fast beamsteering. In this paper, several attractive properties of HCG mirror are introduced such as single material, high reflectance along a wide bandwidth and low-mass inertia and the fabrication result is shown. ±10° × 10° with 2° beam width is observed at 1550 nm wavelength using HCG optical phased array.
Keywords
beam steering; diffraction gratings; electrostatic actuators; micromirrors; electrostatically actuated mirror; free space fast beamsteering; high reflectance; high-contrast-grating mirrors; low-mass inertia; optical phased array; single material; ultra-lightweight mirrors; wavelength 1550 nm; Arrays; Gratings; Laser beams; Mirrors; Optical beams; Optical imaging; Reflectivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318844
Filename
6318844
Link To Document