DocumentCode
3534329
Title
Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry
Author
Chan, Trevor ; Megens, Mischa ; Yoo, Byung-Wook ; Chang-Hasnain, Connie ; Wu, Ming ; Horsley, David
Author_Institution
Mech. & Aerosp. Eng., Univ. of California at Davis, Davis, CA, USA
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
146
Lastpage
147
Abstract
We demonstrate closed-loop control of a MEMS phased array using an optical interferometer designed for in-situ phase-measurement. Phase resolution is comparable with commercial interferometers and we achieve beamsteering without calibration.
Keywords
closed loop systems; light interferometers; micromechanical devices; micromirrors; phase control; phase measurement; 8×8 MEMS mirror array; MEMS phased array; beamsteering; calibration; closed loop phase control; in-situ interferometry; in-situ phase measurement; optical interferometer; phase resolution; Adaptive optics; Arrays; Micromechanical devices; Mirrors; Optical feedback; Optical interferometry; Phase measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318845
Filename
6318845
Link To Document