DocumentCode
3534346
Title
MEMS mirror for flexible z-axis control in a commercial confocal microscope
Author
Lukes, Sarah J. ; Dickensheets, David L.
Author_Institution
Electr. & Comput. Eng. Dept., Montana State Univ., Bozeman, MT, USA
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
148
Lastpage
149
Abstract
We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
Keywords
membranes; micromechanical devices; micromirrors; optical focusing; optical microscopes; MEMS mirror; confocal microscope; deformable membrane mirror; flexible z-axis control; Electrodes; Gold; Lenses; Micromechanical devices; Microscopy; Mirrors;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318846
Filename
6318846
Link To Document