DocumentCode
3534385
Title
2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow
Author
Yoo, Sunghyun ; Jin, Joo-Young ; Ha, Joon-Geun ; Ji, Chang-Hyeon ; Kim, Yong-Kweon
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
154
Lastpage
155
Abstract
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.
Keywords
elemental semiconductors; integrated optics; isolation technology; microlenses; optical fabrication; optical glass; optical scanners; silicon; 2D forward optical scanner; Si; X directions; Y directions; electrical isolation blocks; fabrication method; integrated glass microlens; pressure 1 atm; resonance; scan angles; silicon XY-stage; thermal reflow; two-dimensional forward optical scanner; Glass; Lenses; Microoptics; Optical device fabrication; Optical imaging; Silicon; 2-D forward optical scanner; glass microlens; isolation block; microlens assembly; thermal reflow;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318849
Filename
6318849
Link To Document