Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan

Author

Liu, Lin ; Xie, Huikai

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA

fYear

2012

fDate

6-9 Aug. 2012

Firstpage

158

Lastpage

159

Abstract

We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.

Keywords

microlenses; micromechanical devices; micromirrors; optical scanners; scanning electron microscopy; 2D confocal image; 3D confocal image; MEMS lens scanner; axial scan; depth scan; electrothermal lens scanner; electrothermal two-axis MEMS mirror; lateral scan; three-dimensional confocal scanning microscope; voltage 3 V; wavelength 475 mum; Actuators; Lenses; Micromechanical devices; Microscopy; Mirrors; Optical microscopy; 3D confocal microscopy; MEMS lens scanner; MEMS mirror; electrothermal;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Conference_Location

Banff, AB

ISSN

2160-5033

Print_ISBN

978-1-4577-1511-2

Type

conf

DOI

10.1109/OMEMS.2012.6318851

Filename

6318851