DocumentCode
3534650
Title
PZT micromirror with integrated piezoresistive position sensors
Author
Bakke, Thor ; Johansen, Ib-Rune
Author_Institution
Dept. of Microsyst. & Nanotechnol., SINTEF ICT, Oslo, Norway
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
192
Lastpage
193
Abstract
PZT is an ideal material for high force micromechanical actuators. However, the inherent hysteresis prevents accurate positioning. By integrating piezoresistive sensors it has been shown that the actuation of a piston-type micromirror can be improved.
Keywords
integrated optics; lead compounds; micro-optomechanical devices; microactuators; micromirrors; microsensors; optical sensors; piezoresistive devices; PZT; PZT micromirror; high force micromechanical actuators; inherent hysteresis; integrated piezoresistive position sensors; piston-type micromirror; positioning; Actuators; Hysteresis; Micromirrors; Piezoresistance; Resistors; Sensors; MEMS; PZT; micromirror; mirror; piezoelectric;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318868
Filename
6318868
Link To Document