DocumentCode
3534940
Title
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
Author
Kah How Koh ; Chengkuo Lee
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
236
Lastpage
237
Abstract
A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.
Keywords
CMOS integrated circuits; electromagnetic actuators; integrated optoelectronics; low-power electronics; micromechanical devices; micromirrors; CMOS compatible mirror; electromagnetic actuation; hybrid electrothermal actuation; low power 2D raster scanning MEMS mirror; low power hybrid MEMS mirror; Actuators; CMOS integrated circuits; Coils; Electromagnetics; Micromechanical devices; Micromirrors; Hybrid Actuation; Mirror; Optical Microelectromechanical Systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318890
Filename
6318890
Link To Document