2-D MEMS scanner for handheld multispectral confocal microscopes

We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated from the reflectors to reduce light loss while maintaining chip size to 3.25 × 3.25 mm². The devices are large-scale batch fabricated using a double layer SOI process. The scanner has electrostatic optical deflection angles of 3.25° for the inner axis at 75 V and ±1.6° for the outer axis at 60 V. The device has resonance frequencies of 2.84 kHz and 452 Hz for the inner and outer axis torsional modes respectively.